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Design and modeling of a high-accuracy three-degrees-of-freedom MEMS manipulator [6037-86]

Author(s):
Venugapal S.
Hsu L.-C
Malalur-Nagaraja-Rao S
Wang P. B ( Univ. of Texas at Arlington (USA) )
Chiao M. ( Univ. of British Columbia (Canada) )
Chiao J. C ( Univ. of Texas at Arlington (USA) )
1 more
Publication title:
Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6037
Pub. Year:
2006
Page(from):
60371Y
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460684 [0819460680]
Language:
English
Call no.:
P63600/6037
Type:
Conference Proceedings

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