Blank Cover Image

Modeling of sacrificial spin-on galss (SOG) etching in non-straight microchannels using hydrofluoric acid [6037-72]

Author(s):
Publication title:
Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6037
Pub. Year:
2006
Page(from):
60371O
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460684 [0819460680]
Language:
English
Call no.:
P63600/6037
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Formation of thick spin-on glass (SOG) sarcrificial layer for capacitive acceleromete encapsulation [6037-34]

Hamzah A. A, Majlis B. Y, Ahmad I.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings High Catalytic Activity of Palladium for Metal-Enhanced Hydrofluoric Acid Etching of Silicon

S. Yae, M. Tashiro, T. Hirano, M. Abe, N. Fukumuro

Electrochemical Society
2 Conference Proceedings KOH etching process of perfect square MEMS corrugated diapram [6037-87]

Soin N., Majils B. Y

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Lateral Etch Study of Thin Films Using Hydrofluoric Acid Chemistries for MEMS Devices

Matamis, G., Wang, Chuan-Che, Gogot, B.

Electrochemical Society
3 Conference Proceedings Fabrication of microstructure using electrochemical etching in hydrofluoric acid

Huang, J.-Y., Tsai, H.-Y., Wu, C.-H., Su, C.-C., Fan, C.-H.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw,A., Bois,B.Du, Moor,P.De, Verbist,A., Hoof,C.A.Van, Bender,H., Baert,K.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Aspheric galss lens modeling and machinig (5874-11)

Johnson, R. B., Mandina, M.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Self-Formation of Au Microwires on Au-Covered Si Electrode Surface by Electrochemical Etching in Dilute Hydrofluoric Acid Solution

Kimura, Yasuo, Nemoto, Jun, Kusakabe, Atsushi, Kondo, Yusuke, Niwano, Michio

Materials Research Society
5 Conference Proceedings ETCHING SILICON NITRIDE AND SILICON OXIDE USING ETHYLENE GLYCOL/HYDROFLUORIC ACID MIXTURES

Wood, Alison, Detterbeck, Stefan

Electrochemical Society
11 Conference Proceedings Liberation of Ion Implanted Ge Nanocrystals From a Silicon Dioxide Matrix via Hydrofluoric Acid Vapor Etching

Sharp, I. D., Xu, Q., Liao, C. Y., Ager III, J. W., Beeman, J. W., Yu, K. M., Zakharov, D., Lilienta-Weber, Z., Haller, …

Materials Research Society
6 Conference Proceedings Study on Reactive Species in Catalyst-Referred Etching of 4H-SiC using Platinum and Hydrofluoric Acid

A. Isohahsi, Y. Sano, T. Okamoto, K. Tachibana, K. Arima

Trans Tech Publications
12 Conference Proceedings Characterization of deep wet etching of glass (Invited Paper) [6037-10]

lliescu C., Chen B., Tay F. E. H, National Univ. of singapore (Singapore), Institute of Bioengineering and …

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12