Negative chemical amplification process simulation in integrated circuits and microelectomechanical systems fabrication [6032-15]
- Author(s):
- Publication title:
- ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6032
- Pub. Year:
- 2006
- Page(from):
- 60320F
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460639 [081946063X]
- Language:
- English
- Call no.:
- P63600/6032
- Type:
- Conference Proceedings
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