Optical properties of annealed silicon rich oxide (SRO) films [6029-14]
- Author(s):
- Luna-Lopez A.
- Aceves-Mijares M.
- Malik O.
- Pedraza J. ( INAOE (Mexico) )
- Falcony C. ( CINVESTAV (Mexico) )
- Publication title:
- ICO20 : materials and nanostructures : 21-26 August, 2005, Changchun, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6029
- Pub. Year:
- 2006
- Page(from):
- 60290E
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460608 [0819460605]
- Language:
- English
- Call no.:
- P63600/6029
- Type:
- Conference Proceedings
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