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Reduction of debris and thermal destruction by use of transparent material coating method in femtosecond laser processing [6028-67]

Author(s):
Publication title:
ICO20 : lasers and laser technologies : 21-26 August, 2005, Changchun, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6028
Pub. Year:
2005
Page(from):
90281V
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460592 [0819460591]
Language:
English
Call no.:
P63600/6028
Type:
Conference Proceedings

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