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Design and implementation of a nanometer phase-shifting interferometer for micro-surface profile measurement [6027-22]

Author(s):
Zhu W.
Jing W.
Zhang H.
Jia D.
Zhang Y.
Li Y.
Tang F. ( Tianjin Univ. (China) )
2 more
Publication title:
ICO20: Optical Information Processing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6027
Pub. Year:
2006
Pt.:
1
Page(from):
60270M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460585 [0819460583]
Language:
English
Call no.:
P63600/6027
Type:
Conference Proceedings

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