Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion planting technique [6024-80]

Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion planting technique [6024-80]

Author(s):

Xu Y.

Chen H. ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )

1 more

Publication title:

ICO20 : optical devices and instruments : 21-26 August, 2005, Changchun, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6024

Pub. Year:

2005

Page(from):

602428

Page(to):

602428

Pages:

1

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819460554 [0819460559]

Language:

English

Call no.:

P63600/6024

Type:

Conference Proceedings

Details

TDL ID:	ZA00016059
Series ID:	PA00000029
Conf. info. (Name):	ICO
Conf. info. (Number):	2005 : 20th
Conf. info. (Venue):	Changchun, China
Conf. info. (Date):	2005.08.21-2005.08.26

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