The shear-force/ultrasonic microscope: a nanometrology tool for surface science and technology (Invited Paper) [6002-31]
- Author(s):
- La Rosa A.
- Li N.
- Asante K. ( Portland State Univ. (USA) )
- Publication title:
- Nanofabrication: Technologies, Devices, and Applications II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6002
- Pub. Year:
- 2005
- Page(from):
- 60020U
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460264 [0819460265]
- Language:
- English
- Call no.:
- P63600/6002
- Type:
- Conference Proceedings
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