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Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishing [6182-22]

Author(s):
Hopman, W. C. L. ( Univ. of Twente (Netherlands) )
Ridder, R. M. de ( Univ. of Twente (Netherlands) )
Selvaraja, S. ( Univ. of Twente (Netherlands) )
Bostan, C. G. ( Univ. of Twente (Netherlands) )
Gadgil, V. J ( Univ. of Twente (Netherlands) )
Kuipers, L. ( Univ. of Twente (Netherlands) and FOM Institute for Atomic and Molecular Physics (Netherlands) )
Driessen, A. ( Univ, of Twente (Netherlands) )
2 more
Publication title:
Photonic Crystal Materials and Devices III (i.e. V)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6182
Pub. Year:
2006
Page(from):
61820V
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462381 [0819462381]
Language:
English
Call no.:
P63600/6182
Type:
Conference Proceedings

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