Two different ways for waveguides and optoelectronics components on top of C-MOS [6180-34]
- Author(s):
Fedeli, J. M. ( CEA-DRT LETI (France) ) Jeannot, S. ( STMicroelectronics (France) ) Kostrzewa, M. ( CEA-DRT LETI (France) ) Cioccio, L. Di ( CEA-DRT LETI (France) ) Jousseaume, V. ( CEA-DRT LETI (France) ) Orobtchouk, R. ( Lab. de Physique de la Matiere (France) ) Maury P ( STMicroelectronics (France) ) Zussy M. ( CEA-DRT LETI (France) ) - Publication title:
- Photonics, devices, and systems III :8-11 June 2005, Prague, Czech Republic
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6180
- Pub. Year:
- 2006
- Page(from):
- 61800Y
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819462367 [0819462365]
- Language:
- English
- Call no.:
- P63600/6180
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Optical interconnect: a back end integration scheme for waveguides and optoelectronic InP components [5956-09]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Copper-Barrier and Hard-Mask Elaboration by Plasma-Enhanced Chemical Vapor Deposition Using Organosilane Precursors
Electrochemical Society |
3
Conference Proceedings
Integration issues of a photonic layer on top of a CMOS circuit (Invited Paper) [6125-15]
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
4
Conference Proceedings
Recent Results on Advanced Molecular Wafer Bonding Technology for 3D Integration on Silicon
Electrochemical Society |
10
Conference Proceedings
Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Characterization and design of optical integrated devices for optical clock distribution network
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Introducing Advanced ULK Dielectric Mateials in Interconnects: Performance and Integration Challenges
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |