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Pattern type specific modeling and correction methodology at high NA and off-axis illumination [5992-73]

Author(s):
Suh, S.
Kang, Y.
Kim, I.
Woo, S.
Cho, H.
Moon, J. ( Samsung Electronics Co., Ltd. (South Korea) )
1 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
599220
Page(to):
599220
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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