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Real-world impacts of inverse lithography technology [5992-72]

Author(s):
Ho, J.
Wang, Y.
Wu, X. ( Leitermann, W. )
Xilinx Inc. (USA)
Lin, B.
Shieh, M. F.
Sun, J. ( United Microelectronics Corp. (Taiwan) )
Lin, O.
Lin, J. ( Toppan Changhwa Electronics Co., Ltd. (Taiwan) )
Liu, Y.
Pang, L. ( Luminescent Technologies, Inc. (USA) )
6 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
59921Z
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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