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First 65-nm tape-out using inverse lithography technology (ILT) [5992-67]

Author(s):
Hung, C. -Y.
Zhang, B.
Tang, D.
Guo, E. ( Semiconductor International Manufacturing Corp. (China) )
Pang, L.
Liu, Y.
Moore, A.
Wang, K. ( Luminescent Technologies Inc. (USA) )
3 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
59921U
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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