Haze prevention and phase/transmission preservation through cleaning process optimization [5992-51]
- Author(s):
Qin, J. Zhang, Y. Delgado, R. Rockwell, B. ( Photronics, Inc. (USA) ) Tan, F. ( Spansion Fab 25 (USA) ) Phan, K. ( Spansion SDC (USA) ) Berger, L. ( STEAG HamaTech AG (Germany) ) Liu, M. Dietez, U. ( STEAG HamaTech USA (USA) ) - Publication title:
- 25th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5992
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 59921E
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- Language:
- English
- Call no.:
- P63600/5992
- Type:
- Conference Proceedings
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