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Advanced manufacturing rules check (MRC) for fully-automated assessment of complex reticle designs [5992-10]

Author(s):
0Gladhill, R.
Aguilar, D.
Buck, P. D.
Dawkins, D.
Nolke, S.
Riddick, J.
Straub, J. A. ( Toppan Photomask, Inc. (USA) )
2 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
59920A
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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