Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]

Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]

Author(s):

Antos, R. ( Shizouka Univ. (Japan) )

Ohlidal, I. ( Masaryk Univ. (Czech Republic) )

Mistrik, J.

Yamaguchi, T. ( Shizouka Univ. (Japan) )

Visnovsky, S. ( Charles Univ. (Czech Republic) )

Yamaguchi, S.

Horie, M. ( Dainippon Screen Manufacturing Co., Ltd .(Japan) )

2 more

Publication title:

Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5965

Pub. Year:

2005

Page(from):

59652B

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819459831 [0819459836]

Language:

English

Call no.:

P63600/5965

Type:

Conference Proceedings

Details

TDL ID:	ZA00016002
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Systems Design : Optical fabrication, testing and metrology
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	Jena, Germany
Conf. info. (Date):	2005.09.13-2005.09.15

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