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Critical dimension metrology using optical diffraction microscopy [5965-08]

Author(s):
Agersnap, N.
Hansen, P. -E. ( Luka OptoScope (Denmark) )
Petersen, J. C.
Garnaes, J. ( Danish, Fundamental Metrology (Denmark) )
Destouches, N.
Parriaux, O. ( Univ. of Saint-Etienne (France) )
1 more
Publication title:
Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5965
Pub. Year:
2005
Page(from):
596508
Page(to):
596508
Pages:
1
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459831 [0819459836]
Language:
English
Call no.:
P63600/5965
Type:
Conference Proceedings

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