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Preparation and characterization of multilayers for EUV applications [5963-86]

Author(s):
Publication title:
Advances in optical thin films II : 13-15 September 2005, Jena, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5963
Pub. Year:
2005
Page(from):
59632C
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459817 [081945981X]
Language:
English
Call no.:
P63600/5963
Type:
Conference Proceedings

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