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Wide band laser-plasma soft x-ray source using a gas puff target for direct photo-etching of polymers [5958-44]

Author(s):
Bartnik, A.
Fiedorowicz, H.
Jarocki, R.
Kostecki, J.
Rakowski, R.
Szczurek, M. ( Military Univ. of Technology (Poland) )
1 more
Publication title:
Lasers and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5958
Pub. Year:
2005
Page(from):
595815
Page(to):
595817
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459657 [0819459658]
Language:
English
Call no.:
P63600/5958
Type:
Conference Proceedings

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