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Dynamic measurements of actuators driven by AIN layers [5958-21]

Author(s):
Kacperski, J.
Kujawinska, M. ( Warsaw Univ. of Technology (Poland) )
Lean, S. C. ( Tecnologico de Monterrey (Mexico) )
Nieradko, L.
Jozwik, M.
Gorecki, C. ( Univ. de Franche-Comte (France) )
1 more
Publication title:
Lasers and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5958
Pub. Year:
2005
Page(from):
59580J
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459657 [0819459658]
Language:
English
Call no.:
P63600/5958
Type:
Conference Proceedings

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