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Fabrication of nanostructures by dry etching using dewetted Pt islands as etch-masks [5931-51]

Author(s):
  • Lee, J. -M. ( Sunchon National Univ. (South Korea) )
  • Park, S. -G. ( Gwangju Institute of Science and Technology (South Korea) )
Publication title:
Nanoengineering: fabrication, properties, optics, and devices II : 3-4 August, 2005, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5931
Pub. Year:
2005
Page(from):
593119
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459367 [0819459364]
Language:
English
Call no.:
P63600/5931
Type:
Conference Proceedings

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