Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror frabrication [5921-24]

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror frabrication [5921-24]

Author(s):

Mimura, H.

Mori, Y. ( Osaka Univ. (Japan) )

Nishino, Y. ( SPring-8/JASRI (Japan) )

Tabashi, M. ( SPring-8/RIKEN (Japan) )

Tamasaku, K. ( SPring-8/JASRI (Japan) )

Ishikawa, T. ( SPring-8/JASRI (Japan) SPring-8/RIKEN (Japan) )

Yamauchi, Y. ( Osaka Univ. (Japan) )

7 more

Publication title:

Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5921

Pub. Year:

2005

Page(from):

59210M

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819459268 [0819459267]

Language:

English

Call no.:

P63600/5921

Type:

Conference Proceedings

Details

TDL ID:	ZA00015958
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advances in metrology for x-ray and EUV optics
Conf. info. (Number):	2005
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.08.02-2005.08.03

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