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Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China [5921-04]

Author(s):
  • Qian, S. ( Brookhaven National Lab. (USA) )
  • Wang, Q.
  • Hong, Y. ( Nation Synchrotron Radiation Lab./Univ. of Science and Technology of China (China) )
  • Takacs, P. Z. ( Brookhaven National Lab. (USA) )
Publication title:
Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5921
Pub. Year:
2005
Page(from):
592104
Page(to):
592104
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459268 [0819459267]
Language:
English
Call no.:
P63600/5921
Type:
Conference Proceedings

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