Compact EUV light sources for at-wavelength metrology (Invited Paper) [5918-08]
- Author(s):
- Owens, S. M. ( NASA Goddard Space Fligt Ct. (USA) )
- Publication title:
- Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5918
- Pub. Year:
- 2005
- Page(from):
- 591807
- Page(to):
- 591807
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819459237 [0819459232]
- Language:
- English
- Call no.:
- P63600/5918
- Type:
- Conference Proceedings
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