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Improvement in total measurement uncertainty for gate CD control [5878-24]

Author(s):
Bunday, B. D. ( ISMI (USA); )
Sirjgabu, O.
Wen, Y.
Paranipe, A.
Terbeek, P. ( Therma-Wave, Inc. (USA) )
Allgair, J.
Peterson, A., ( ISMI (USA) )
2 more
Publication title:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5878
Pub. Year:
2005
Page(from):
58780M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458834 [081945883X]
Language:
English
Call no.:
P63600/5878
Type:
Conference Proceedings

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