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High performance motion control of the novel optical servo scanning platform (5873-24)

Author(s):
Publication title:
Optical Scanning 2005
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5873
Pub. Year:
2005
Page(from):
183
Page(to):
193
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458780 [0819458783]
Language:
English
Call no.:
P63600/5873
Type:
Conference Proceedings

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