Novel 3D scanner based on electrostatically drivern resonant micromirrors (5873-13)
- Author(s):
Schelinski, U. Bergman, A. Dallman, H.G. Gerwig, C. Kleinmann, L. Lakner, H. Nauber, P. Neumann, H. Scholles, M. Wolter, A. ( Fraunhofer Intitut Photoniche Mikrosysteme (Germany) ) - Publication title:
- Optical Scanning 2005
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5873
- Pub. Year:
- 2005
- Page(from):
- 95
- Page(to):
- 104
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458780 [0819458783]
- Language:
- English
- Call no.:
- P63600/5873
- Type:
- Conference Proceedings
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