Absolute accuracy evaluation of aspherical null testing for EUVL mirrors [5869-29]

Absolute accuracy evaluation of aspherical null testing for EUVL mirrors [5869-29]

Author(s):

Takigawa, Y.
Nakayama, S.
Yamamoto, T.
Gemma, T. ( Nikon Corp. (Japan) )

Publication title:

Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5869

Pub. Year:

2005

Page(from):

58690Q

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458742 [0819458740]

Language:

English

Call no.:

P63600/5869

Type:

Conference Proceedings

Details

TDL ID:	ZA00015908
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical manufacturing and testing
Conf. info. (Number):	2005 : 6th
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.07.31-2005.08.01

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