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Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications [5858-33]

Author(s):
  • Lu, N. H. ( De Lin Institute of Technology (Taiwan) and National Taiwan Univ. (Taiwan) )
  • Chang, Y. M. ( De Lin Institute of Technology (Taiwan) )
  • Tsai, D. P. ( National Taiwan Univ. (Taiwan) )
Publication title:
Nano- and Micro-Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5858
Pub. Year:
2005
Page(from):
58580W
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458582 [0819458589]
Language:
English
Call no.:
P63600/5858
Type:
Conference Proceedings

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