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Phase correlation method for subpixel in-plane vibration measurements of MEMS by stroboscopic microscopy [5856-113]

Author(s):
Publication title:
Optical Measurement Systems for Industrial Inspection IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5856
Pub. Year:
2005
Pt.:
2
Page(from):
755
Page(to):
762
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458568 [0819458562]
Language:
English
Call no.:
P63600/5856
Type:
Conference Proceedings

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