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Development of an optical interferometer for micro-components inspection [5852-56]

Author(s):
Publication title:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5852
Pub. Year:
2005
Pt.:
1
Page(from):
345
Page(to):
351
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458520 [081945852X]
Language:
English
Call no.:
P63600/5852
Type:
Conference Proceedings

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