Reactive magnetron sputtering of antinomy tin oxide films on glass substrate [5852-54]

Reactive magnetron sputtering of antinomy tin oxide films on glass substrate [5852-54]

Author(s):

Liu, C.-C.
Huang, W.-C.
Lu, F.-L.
Wang, C.-T. ( Kun Shan Univ. of Technology (Taiwan) )

Publication title:

Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5852

Pub. Year:

2005

Pt.:

1

Page(from):

333

Page(to):

338

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458520 [081945852X]

Language:

English

Call no.:

P63600/5852

Type:

Conference Proceedings

Details

TDL ID:	ZA00015892
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Conf. info. (Number):	2004 : 3rd
Conf. info. (Venue):	Singapore
Conf. info. (Date):	2004.11.29-2004.12.01

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