Deformation field measurement on micro and nanotechnology components utilizing SFM and FIB equipment [5852-49]
- Author(s):
- Vogel, D.
- Keller, J.
- Gollhardt, A.
- Michel, B. ( Fraunhofer-Institut fur Zuverlassigkeit und Mikrointegration (Germany) )
- Publication title:
- Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5852
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 302
- Page(to):
- 308
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458520 [081945852X]
- Language:
- English
- Call no.:
- P63600/5852
- Type:
- Conference Proceedings
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