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Fabrication and characterization of piezoelectric cantilever for micro transducers [5852-46]

Author(s):
  • Xie, J. ( Nanyang Technological Univ. (Singapore) )
  • Hu, M. ( Univ. of Frieburg (Germany) )
  • Ling, S.-F.
  • Du, H. ( Nanyang Technological Univ. (Singapore) )
Publication title:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5852
Pub. Year:
2005
Pt.:
1
Page(from):
283
Page(to):
288
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458520 [081945852X]
Language:
English
Call no.:
P63600/5852
Type:
Conference Proceedings

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