Phase error compensation for a 3D shape measurement system based on the phase- shifting method [6000-14]
- Author(s):
- Zhang, S. ( Harvard, Univ. (USA) )
- Huang, P.S. ( SUNY at Stony Brook (USA) )
- Publication title:
- Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6000
- Pub. Year:
- 2005
- Page(from):
- 60000E
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460240 [0819460249]
- Language:
- English
- Call no.:
- P63600/6000
- Type:
- Conference Proceedings
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