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3D optical measurement using phase shifting based methods (Invited Paper) [6000-02]

Author(s):
Publication title:
Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6000
Pub. Year:
2005
Page(from):
600002
Page(to):
600002
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460240 [0819460249]
Language:
English
Call no.:
P63600/6000
Type:
Conference Proceedings

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