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Plasma assisted deposition of tungsten oxide/silicon oxide multilayer films with sub-nanometer single layers

Author(s):
Publication title:
Functional properties of nanostructured materials
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
223
Pub. Year:
2006
Page(from):
351
Page(to):
355
Pages:
5
Pub. info.:
Dordrecht: Springer
ISBN:
9781402045936 [140204593X]
Language:
English
Call no.:
N17050/223
Type:
Conference Proceedings

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