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Investigation of The Electronic Properties of Thin Dielectric Films by Scanning Probe Microscopy

Author(s):
Antonov, D. A.
Filatov, D. O.
Kruglov, A. V.
Maximov, G. A.
Zenkevich, A. V.
Lebedinskii, Y.
1 more
Publication title:
Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
220
Pub. Year:
2006
Page(from):
471
Page(to):
480
Pages:
10
Pub. info.:
Dordrecht: Springer
ISBN:
9781402043659 [1402043651]
Language:
English
Call no.:
N17050/220
Type:
Conference Proceedings

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