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The Effects of Deposition Pressure on the Optical and Structural Properties of d.c. PECVD Hydrogenated Amorphous Carbon Films

Author(s):
Publication title:
Functional materials and devices : papers presented at the International Conference on Functional Materials and Devices 2005 (ICFMD-2005), held in Kuala Lumpur, Malaysia, 6th-8th June 2005
Title of ser.:
Materials science forum
Ser. no.:
517
Pub. Year:
2006
Page(from):
81
Page(to):
84
Pages:
4
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494040 [0878494049]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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