The Study of High Temperature Annealing of a-SiC:H Films

The Study of High Temperature Annealing of a-SiC:H Films

Author(s):

Zhang, S.

Publication title:

Advanced materials forum III : proceedings of the III International Materials Symposium Materiais 2005 and XII Encontro da Sociedade Portuguesa de Materiais - SPM Universidade de Aveiro, March 20-23, Aveiro, Portugal, 2005

Title of ser.:

Materials science forum

Ser. no.:

514-516

Pub. Year:

2006

Pt.:

1

Page(from):

18

Page(to):

22

Pages:

5

Pub. info.:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494026 [0878494022]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00015823
Series ID:	PA00000012
Conf. info. (Name):	International Materials Symposium ; Encontro da Sociedade Portuguesa de Materiais (SPM)
Conf. info. (Number):	2005 : 3rd ; 12th
Conf. info. (Venue):	Aveiro, Portugal
Conf. info. (Date):	2005.03.20-2005.03.23

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