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Low-Temperature Preparation of Crystallized Zirconia Films by ECR Plasma MOCVD

Author(s):
Publication title:
Surface engineering for manufacturing applications : symposium held November 28-December 1, 2005, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
890
Pub. Year:
2006
Page(from):
183
Page(to):
188
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998445 [1558998446]
Language:
English
Call no.:
M23500/890
Type:
Conference Proceedings

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