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NANOCRYSTALLINE SiC FORMATION FROM SPUTTER-DEPOSITED NON-EQUILIBRIUM a-SiCXC1-X ALLOYS

Author(s):
Publication title:
Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
298
Pub. Year:
1993
Page(from):
235
Page(to):
240
Pages:
6
Pub. info.:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991941 [1558991948]
Language:
English
Call no.:
M23500/298
Type:
Conference Proceedings

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