HYDROGEN RADICAL ANNEALING EFFECT ON THE GROWTH OF MICROCRYSTALLINE SILICON

HYDROGEN RADICAL ANNEALING EFFECT ON THE GROWTH OF MICROCRYSTALLINE SILICON

Author(s):

Jun, Jung Mok

Publication title:

Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

298

Pub. Year:

1993

Page(from):

163

Page(to):

168

Pages:

6

Pub. info.:

Pittsburgh, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558991941 [1558991948]

Language:

English

Call no.:

M23500/298

Type:

Conference Proceedings

Details

TDL ID:	ZA00015782
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicon-based optoelectronic materials
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.12-1993.04.14

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