Blank Cover Image

A SPECTROSCOPIC INVESTIGATION OF THE AMORPHOUS TO MICROCRYSTALLINE TRANSITION IN SILICON PREPARED BY REACTIVE MAGNETRON SPUTTERING

Author(s):
Publication title:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
297
Pub. Year:
1993
Page(from):
521
Page(to):
526
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991934 [155899193X]
Language:
English
Call no.:
M23500/297
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ELECTRICAL PROPERTIES OF BORON-DOPED μc-Si:H PREPARED BY REACTIVE MAGNETRON SPUTTERING FROM c-Si TARGETS

Turner, W.A., Williams, M.J., Chen, Y.L., Maher, D.M., Lucovsky, G.

Materials Research Society
7 Conference Proceedings Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

H.-W. Wang, W.-N. Su, C.-W. Han, S.-H. Chen, C.-C. Lee

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings DEPOSITION OF MICROCRYSTALLINE Si,Ge (ｦﾌc-Si,Ge) ALLOYS BY REACTIVE MAGNETRON SPUTTERING

Cho, S. M., Wolfe, D., He, S. S., Christensen, K., Maher, D. M., Lucovsky, G.

MRS - Materials Research Society
8 Conference Proceedings Electric and Optical Properties of ｦﾌc-Si,Ge:H Alloys Deposited by Reactive Magnetron Sputtering (RMS)

Cho, S. M., Wolfe, D., Christensen, K., Lucovsky, G., Maher, D. M.

MRS - Materials Research Society
3 Conference Proceedings GROWTH AND STRUCTURE OF MICROCRYSTALLINE SILICON BY REACTIVE DC MAGNETRON SPUTTERING

Feng, G. F., Katiyar, M., Yang, Y.H., Abelson, J.R., Maley, N.

Materials Research Society
9 Conference Proceedings Low Temperature Fabrication of Microcrystalline Silicon Germanium Films by RF Reactive Magnetron Sputtering

Isao Nakamura, Toru Ajiki, Masao Isomura

Materials Research Society
4 Conference Proceedings Magnetron-Sputtered Metal-Amorphous Silicon Interfaces

Anderson, W. W., Crowley, J. L., Jonath, A. D., MacMillan, H. F, Opyd, W. G., Thornton, J. A.

North-Holland
10 Conference Proceedings Enhanced Crystallinity of Microcrystalline Silicon Thin Films Using Deuterium in Reactive Magnetron Sputter Deposition at 230｡?C

Gerbi, J. E., Voyles, P., Gibson, J. M., Abelson, J. R.

MRS - Materials Research Society
5 Conference Proceedings MICROCRYSTALLINE SILICON BY DC MAGNETRON SPUTTERING: GROWTH MECHANISMS

Feng, G.F., Katiyar, M., Yang, Y.H., Abelson, J.R., Maley, N.

Materials Research Society
11 Conference Proceedings Bonding Defects in Hydrogenated Amorphous Silicon

Lucovsky, G., Yang, H.

MRS - Materials Research Society
6 Conference Proceedings On the formation and characterization of microcrystalline Si: H prepared by RF magnetron sputtering

Kiriakidis G., Logothetides S.

Kluwer Academic Publishers
12 Conference Proceedings Investigation of Reactively Sputtered Titania Thin Films Prepared by DC, Pulsed and Highly Ionized Pulsed Power Magnetron Sputtering

R. Bandori, M. Vergöhl, K. Schiffmann, T. Wallendori

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12