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LASER DEHYDROGENATION OF PECVD AMORPHOUS SILICON

Author(s):
Mei, P.
Boyce, J.B.
Hack, M.
Lujan, R.A.
Johnson, R.I.
Anderson, G.B.
Fork, D.K.
Ready, S.E.
Smith, D.L.
4 more
Publication title:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
297
Pub. Year:
1993
Page(from):
151
Page(to):
158
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991934 [155899193X]
Language:
English
Call no.:
M23500/297
Type:
Conference Proceedings

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