DEPOSITION OF THIN FILMS OF SILICON CARBIDE ON FUSED QUARTZ AND ON SAPPHIRE BY LASER ABLATION OF CERAMIC SILICON CARBIDE TARGETS

DEPOSITION OF THIN FILMS OF SILICON CARBIDE ON FUSED QUARTZ AND ON SAPPHIRE BY LASER ABLATION OF CERAMIC SILICON CARBIDE TARGETS

Author(s):

Rimai, L.

Publication title:

Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

285

Pub. Year:

1993

Page(from):

495

Page(to):

500

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991804 [1558991808]

Language:

English

Call no.:

M23500/285

Type:

Conference Proceedings

Details

TDL ID:	ZA00015769
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser ablation in materials processing
Conf. info. (Number):	1992
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.12.01-1992.12.04

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