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TITANIUM OXYNITRIDE THIN FILM DEPOSITION BY PULSED LASER ABLATION OF TITANIUM TARGETS IN NITROGEN

Author(s):
Craciun, V.
Craciun, D.
Amirhaghi, S.
Vickers, M.
Tarling, S.
Barnes, P.
Boyd, I.W.
2 more
Publication title:
Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
285
Pub. Year:
1993
Page(from):
337
Page(to):
342
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991804 [1558991808]
Language:
English
Call no.:
M23500/285
Type:
Conference Proceedings

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