PULSED LASER DEPOSITION OF THIN SILICON NITRIDE FILMS
- Author(s):
Xu, Xiangqun Seki, Kanekazu Chen, Naiqun Okabe, Hideo Frye, Joan M. Halpern, Joshua B. - Publication title:
- Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 285
- Pub. Year:
- 1993
- Page(from):
- 331
- Page(to):
- 336
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991804 [1558991808]
- Language:
- English
- Call no.:
- M23500/285
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Influence of laser fluence on the synthesis of carbon nitride thin films by nitrogen-ion-assisted pulsed-laser deposition
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
11
Conference Proceedings
ELECTRON MICROSCOPY STUDY OF CUBIC BORON NITRIDE THIN FILMS GROWN BY ION-ASSISTED PULSED LASER DEPOSITION
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |