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PROPERTIES OF ULTRATHIN AMORPHOUS SILICON NITRIDE FILMS ON III-V SEMICONDUCTORS

Author(s):
Huang, L.J.
Kwok, R.W.M.
Lau, W.M.
Tang, H.T.
Lennard, W.N.
Mitchell, I.V.
Schultz, Peter J.
Landheer, D.
3 more
Publication title:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
284
Pub. Year:
1993
Page(from):
595
Page(to):
600
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991798 [1558991794]
Language:
English
Call no.:
M23500/284
Type:
Conference Proceedings

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