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HYDROGEN IN RF REACTIVE MAGNETRON SPUTTER SILICON NITRIDE FILMS

Author(s):
Lin, Chi-Hsien
Wachtman, J.B.
Sigel, G.H.
Pfeffer, R.L.
Monahan, T.P.
Lareau, R.T.
1 more
Publication title:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
284
Pub. Year:
1993
Page(from):
21
Page(to):
26
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991798 [1558991794]
Language:
English
Call no.:
M23500/284
Type:
Conference Proceedings

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